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US 7,612,346 B2Granted
Non-axisymmetric charged-particle beam system
AssigneeMassachusetts Institute of Technology
InventorsRonak J. Bhatt, Chiping Chen, Jing Zhou
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Abstract
The charged-particle beam system includes a non-axisymmetric diode forms a non-axisymmetric beam having an elliptic cross-section. A focusing element utilizes a magnetic field for focusing and transporting the non-axisymmetric beam, wherein the non-axisymmetric beam is approximately matched with the channel of the focusing element.
Claims18
A non-axisymmetric diode comprising:
- at least one electrical terminal for emitting charged-particles;
- at least one electrical terminal for establishing an electric field and accelerating charged-particles to form a charged-particle beam;
- wherein said terminals are arranged so that said charged-particle beam possesses an elliptic cross-section.
A method of forming a non-axisymmetric diode comprising:
- forming at least one electrical terminal for emitting charged-particles;
- forming at least one electrical terminal for accepting and/or accelerating charged-particles to form a charged-particle beam;
- and
- arranging said terminals so that said charged-particle beam possesses an elliptic cross-section.
1 more element
Dependencies are inferred from the claim text.