Semiconductor light emitting element and method of manufacturing the same

A method of manufacturing a semiconductor light emitting element comprising a conductive substrate, a bonding metal layer formed on said conductive substrate, a barrier layer formed on said bonding metal layer, a reflective layer formed on said barrier layer, an ohmic electrode layer formed on said reflective layer, a second conductivity type semiconductor layer formed on said ohmic electrode layer, a light emitting layer formed on said second conductivity type semiconductor layer, and a first conductivity type semiconductor layer formed on said light emitting layer, the method comprising:

• removing outer peripheries of said second conductivity type semiconductor layer, said light emitting layer, and said first conductivity type semiconductor layer by dry etching;
• and
• immersing in an etchant surfaces exposed by said dry etching of said second conductivity type semiconductor layer, said light emitting layer and said first conductivity type semiconductor layer.