Image sensor and method for manufacturing the same
AssigneeDongbu HiTek Co., Ltd.
InventorYoung Je Yun
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AssigneeDongbu HiTek Co., Ltd.
InventorYoung Je Yun
Estimating the term…
A method for manufacturing an image sensor includes forming first to third photodiodes and first to third color filters corresponding thereto; forming a photoresist film including photosensitive materials on the upper surfaces of the first to third color filters; forming a first exposed part by exposing the photoresist film with a first exposure energy using a first pattern mask with a first light transmitting part having a first width at boundaries between the individual color filters; forming a second exposed part overlapping a portion of the first exposed part by exposing the photoresist film with a second exposure energy smaller than the first exposure energy using a second pattern mask with a second light transmitting part having a second width wider than the first width; and forming microlenses by developing the photoresist film.
A method of manufacturing an image sensor comprising the steps of:
Dependencies are inferred from the claim text.