Back to results
US 7,611,920 B1Granted
Photonic coupling scheme for photodetectors
AssigneeBAE Systems Information and Electronic Systems Integration Inc.
InventorSteven R. Jost
Life of this patent
Estimating the term…
Abstract
A room temperature operation polycrystalline infrared responsive photodetector, manufactured by a process, comprising the steps of patterning vacuum-deposited material and dry-etching a photonic crystal structure with resonant coupling tuned to long wavelengths.
Claims8
A room temperature operation polycrystalline infrared responsive photodetector, manufactured by a process comprising the steps of:
- patterning vacuum-deposited material;
- and
- dry-etching a photonic crystal structure with resonant coupling tuned to long wavelengths which are equal to or greater than about 4 microns.
Dependencies are inferred from the claim text.