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US 7,611,911 B2Granted
Method and system for patterning of magnetic thin films using gaseous transformation to transform a magnetic portion to a non-magnetic portion
AssigneeInternational Business Machines Corporation
InventorsDavid William Abraham, Eugene John O'Sullivan
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Abstract
A method (and resulting structure) of patterning a magnetic thin film, includes using a chemical transformation of a portion of the magnetic thin film to transform the portion to be non-magnetic and electrically insulating.
Claims17
A method of patterning a magnetic thin film, comprising:
- transforming a portion of the magnetic thin film to be non-magnetic and electrically insulating using a chemical transformation, said chemical transformation comprises using a reactive plasma comprising a combination of a fluorine-based gas and a bromide-containing gas,
- wherein said reactive plasma includes 5% to 10% bromide,
- wherein said portion of said magnetic thin film comprises NiFe and said transforming comprises transforming said NiFe to a fluorine-containing film, and
- wherein said fluorine-containing film is electrically insulating.
1 more element
Dependencies are inferred from the claim text.