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US 7,611,821 B2Granted
Positive resist compositions and patterning process
AssigneeShin-Etsu Chemical Co., Ltd.
InventorsTsunehiro Nishi, Takeshi Kinsho
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Abstract
A positive resist composition is provided comprising (A) a resin component having a carboxylic acid moiety protected with an acetal protective group which is decomposable under the action of an acid, wherein in the carboxylic acid moiety protected with an acetal protective group, deprotection occurs not by way of β-elimination, and (B) a photoacid generator. The resist composition exhibits a high resolution when processed by ArF lithography.
Claims2
A positive resist composition comprising
- (A) a resin component, and
- (B) a compound which generates an acid in response to actinic light or radiation,
- said resin compound comprising recurring units of the following formula:
- recurring units of the following formula:
- and recurring units selected from the group consisting of the following formulae:
- wherein R is hydrogen atom or methyl group.
3 more elements
Dependencies are inferred from the claim text.