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US 7,611,810 B2Granted
Charged beam processing apparatus
AssigneeCanon Kabushiki Kaisha
InventorsMasahiko Okunuki, Haruhito Ono, Shinan Wang, Kenji Tamamori
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AssigneeCanon Kabushiki Kaisha
InventorsMasahiko Okunuki, Haruhito Ono, Shinan Wang, Kenji Tamamori
Estimating the term…
A charged beam processing apparatus for processing an object to form structures on the object includes a processing chamber, a multi-charged beam optical system configured to generate a plurality of charged beams, and to converge and to deflect the plurality of charged beams to irradiate the object in the processing chamber with the plurality of charged beams, and a supply port configured to supply a gas into the processing chamber. The multi-charged beam optical system includes (i) a lens array, and (ii) a pattern forming plate configured to select a portion of the lens array to be used to form the structures. The charged beam processing apparatus includes a controller configured to control an exchange of the pattern forming plate in accordance with an arrangement pattern of the structures to be formed on the object.
A charged beam processing apparatus for processing an object to form structures on the object, the apparatus including a processing chamber, a multi-charged beam optical system configured to generate a plurality of charged beams, and to converge and to deflect the plurality of charged beams to irradiate the object in the processing chamber with the plurality of charged beams, and a supply port configured to supply a gas into the processing chamber,
Dependencies are inferred from the claim text.