Process for manufacturing a metal electrode
AssigneeCerel (Ceramics Technologies) Ltd.
InventorsNissim Cohen, Israel Schuster, Ludmila Cherniak, Tali Peled
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Abstract
The present invention provides a process for manufacturing a porous metal electrode, wherein the porosity degree is in the range of 30 to 50% and the metal is capable of forming a stable, uniform, oxide layer having a dielectric constant greater than 25 (k≧25), preferably selected from the group consisting of tantalum and niobium, comprising a substantially uniform porous layer of deposited said metal particles thereon. The present invention further relates to a stable suspension for electrophoretically homogeneously deposition of said metal.
Claims19
An electrophoretic process for producing a porous metal electrode,
- wherein said electrode comprises a metal, capable of forming a stable oxide layer having a dielectric constant equal to or greater than 20, selected from the group consisting of tantalum and niobium,
- wherein said metal electrode comprises a substantially uniform porous layer of deposited particles of said metal having a porosity degree in the range of 30 to 50% deposited thereon, which process comprises the steps of:
- (a) providing a metal suspension of said metal in a polar solvent;
- (b) immersing a temporary cathode and a counter electrode in said suspension, and running a pre-processing initiating step by electrifying said temporary cathode as a deposition electrode;
- (c) replacing said temporary cathode with a new deposition electrode wherein said new deposition electrode is constituted by a metal foil;
- and
- (d) electrifying said new deposition electrode, so to cause electrophoretic homogeneous deposition of said metal particles onto the surface of said new deposition electrode.
Dependencies are inferred from the claim text.