Processes of forming small diameter rods and tubes
AssigneeCambridge Enterprise Limited
InventorsFinlay Doogan Morrison, James Floyd Scott
Life of this patent
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Abstract
The invention provides a method for the production of a photonic device comprising providing a substrate, forming in the substrate substantially straight pores, lining or filling the pores with a material having voltage-dependent index of refraction, and removing part but not all of the substrate materials so that an array remains of tubes or rods of material having voltage-dependent index of refraction. In a variant of the method the deposited material is piezoelectric and the substrate is completely removed, resulting in piezoelectric tubes or rods of small diameter, generally below 10 μm.
Claims21
A method for the production of a photonic device comprising providing a substrate, forming in the substrate substantially straight pores, lining or filling the pores with a lining material, and removing part but not all of the substrate material so that an array remains of tubes or rods of the lining material.
A process for the production of rods or tubes of piezoelectric material, comprising providing a substrate, forming in the substrate substantially straight pores, filling or lining the pores with a piezoelectric material, and completely removing the substrate material so that independent rods or tubes of piezoelectric material remain.
A process for the production of an array of rods or tubes of piezoelectric material, comprising providing a substrate, forming in the substrate substantially straight pores, filling or lining the pores with piezoelectric material, and removing all but the base of the substrate material so that an array remains of upwardly-extending tubes or rods of piezoelectric material.
An array of rods or tubes of piezoelectric material having diameters of not more than 10 microns, the rods or tubes being parallel and upwardly extending from a supporting base of substrate material.
Dependencies are inferred from the claim text.