US 7,611,548 B2Granted

Vertical sublimation apparatus

AssigneeIndustrial Technology Research Institute

InventorsShyue-Ming Jang, Sheng Yang, Bang-I Liou, Jun-Yi Chen, Long-Shuenn Jean, Chun-Te Tsai, Chiu-Tung Huang

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Abstract

A vertical and a horizontal vacuum sublimation apparatus with high efficiency and processes thereof are provided, especially for the materials with high melting point and low vapor pressure. The vertical sublimation purification apparatus comprises a sublimation channel body, a material rack, a heating evaporation device, a condensation device, an incubating device, and a product scratching device. The horizontal sublimation purification apparatus comprises a sublimation channel body, a material carrier, a heating evaporation device, and two end pipes. The apparatuses of the present invention can be applied to the mass production of high purity chemicals, and are capable of sublimating and purifying OLED illumination layer materials including Alq3, NPB and CuPc, which have high melting temperature and low vapor pressure.

Claims15

Dependent claims

A vertical sublimation apparatus, comprising:

a sublimation channel body;
a material rack for storing materials that will be evaporated;
a heating evaporation device surrounding an evaporation pipe to control heating temperatures according to different materials for evaporating said materials;
a vapor channel for transporting said evaporated materials into said sublimation channel body;
a vapor channel incubating device surrounding said vapor channel for maintaining the temperature of said vapor channel;
a condensation device surrounding the upper part of said sublimation channel body for controlling condensation temperatures required by different evaporated materials;
a product incubating device for maintaining the temperature of end products;
and
a product scratching device;
wherein said heating evaporation device, said vapor channel, said condensation device, said vapor channel incubating device and said product incubating device are individually configured.

7 more elements

Dependencies are inferred from the claim text.