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US 7,611,318 B2Granted
Overhead transfer flange and support for suspending a substrate carrier
AssigneeApplied Materials, Inc.
InventorsMichael R. Rice, Martin R. Elliott, Robert B. Lowrance, Jeffrey C. Hudgens, Eric A. Englhardt
Life of this patent
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Abstract
In a first aspect, a first apparatus is provided for use in supporting a substrate carrier. The first apparatus includes an overhead transfer flange adapted to couple to a substrate carrier body and an overhead carrier support. The overhead transfer flange has a first side and a second side opposite the first side that is wider than the first side. Numerous other aspects are provided.
Claims6
An apparatus for use in supporting a substrate carrier comprising:
- an overhead transfer flange adapted to couple to a substrate carrier body and an overhead carrier support of an overhead transfer conveyor, the overhead transfer flange having:
- a flange plate adapted to couple to the substrate carrier;
- a first side;
- a second side opposite the first side that is wider than the first side;
- a third side extending from the first side to the second side and including a blade adapted to engage supporting features of the overhead carrier support;
- and
- a fourth side opposite the third side extending from the first side to the second side and including a blade adapted to engage supporting features of the overhead carrier support;
- wherein the blades of the third side and the fourth side of the overhead transfer flange extend from the first side to the second side along non-parallel paths and wherein a medial surface of each blade forms an oblique angle with a plane defined by the first, second, third and fourth sides of the transfer flange and wherein the blades of the third side and the fourth side extend down from lower surfaces of the flange plate located adjacent to, and between the blades, and the blades include a blade edge terminating below the lower surfaces.
5 more elements
Dependencies are inferred from the claim text.