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US 7,611,039 B2Granted
Ultrasonic transducer comprising a sensor disposed in the mounting
AssigneeHesse & Knipps GmbH
InventorsHans-Juergen Hesse, Joerg Wallaschek, Piotr Vasiljev
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Abstract
The invention relates to an ultrasonic transducer comprising at least one sensor, particularly for use in ultrasonic bonders. At least one sensor (4, 6) is arranged in/on a mounting (2, 3) of the ultrasonic transducer and, in particular, by means of which a transverse extension perpendicular to a propagating exciting ultrasonic wave can be metrologically detected.
Claims16
An ultrasonic transducer comprising:
- at least one sensor,
- a mounting having an annular diaphragm, said diaphragm extending perpendicular to the longitudinal axis of the ultrasonic transducer,
- wherein said at least one sensor is adhesively bonded and/or screwed onto the diaphragm, in particular in the form of a tongue-like element which protrudes from the diaphragm, and
- wherein by means of said at least one sensor a lateral strain can be detected by measurement perpendicular to a propagating exciting ultrasonic wave.
1 more element
A method for operating an ultrasonic transducer comprising the steps of:
- (1) conducting a bonding process of the ultrasonic transducer;
- (2) detecting at least one measurement variable by measurement during the bonding process of step (1), said measurement variable representing a lateral strain;
- (3) evaluating the process parameters during the bonding process in order to assess the quality of the bonding process, wherein said process parameters are used as a control variable;
- (4) adjusting the bonding force, ultrasonic power or ultrasonic frequency,
- wherein the ultrasonic transducer has at least one sensor, and a mounting with annular diaphragm extending perpendicular to the longitudinal axis of the ultrasonic transducer, wherein said at least one sensor is adhesively bonded and/or screwed onto the diaphragm, in particular in the form of a tongue-like element which protrudes from the diaphragm.
2 more elements
An ultrasonic transducer comprising:
- at least one sensor,
- a mounting having an annular diaphragm, said diaphragm extending perpendicular to the longitudinal axis of the ultrasonic transducer,
- at least one tongue-like element, said at least one tongue-like element secured to the diaphragm, wherein said at least one tongue-like element carries a piezoelectric element having an electrode,
- wherein said at least one sensor is disposed on said annular diaphragm,
- and wherein by means of said at least one sensor a lateral strain can be detected by measurement perpendicular to a propagating exciting ultrasonic wave.
2 more elements
An ultrasonic transducer comprising:
- at least one sensor,
- a mounting having an annular diaphragm, said diaphragm extending perpendicular to the longitudinal axis of the ultrasonic transducer, said diaphragm forming an electrode itself,
- wherein said at least one sensor is disposed on said annular diaphragm, and wherein by means of said at least one sensor a lateral strain can be detected by measurement perpendicular to a propagating exciting ultrasonic wave.
Dependencies are inferred from the claim text.