Robust MEMS flow die with integrated protective flow channel
AssigneeHoneywell International Inc.
InventorLamar F. Ricks
Life of this patent
Estimating the term…
Abstract
A MEMS flow sensor has a flow channel that avoids wire bond pads and ancillary circuit elements. A fluid can move from the bottom of the sensor substrate, though an inlet hole, over a sensing element on the top of the substrate, and then through an outlet hole. The inlet hole and the outlet hole can pass from the substrate top to the substrate bottom. A top cap can be fixed to the top of the substrate such that it covers the sensing element, the inlet hole, and the outlet hole. The top cap constrains the flow channel and keeps fluid, either gaseous or liquid, from exiting the channel and contacting the wire bond pads or ancillary circuit elements.
Claims20
A system comprising:
- a substrate having a top surface and a bottom surface;
- a sensing element electrically connected to a plurality of wire bond pads on the top surface;
- an inlet hole and an outlet hole that pass through the substrate from the top surface to the bottom surface;
- and
- a top cap fixed to the top surface wherein the top cap covers the inlet hole, the sensing element, and the outlet hole such that a fluid flowing into the inlet hole flows over the sensing element and out of the outlet hole and wherein the top cap prevents the fluid from contacting the wire bond pads.
A system comprising:
- a substrate having a top surface and a bottom surface;
- a flow sensing element electrically connected to a multiplicity of wire bond pads on the top surface;
- an inlet hole and an outlet hole that pass through the substrate from the top surface to the bottom surface;
- and
- a top cap fixed to the top surface wherein the top cap covers the inlet hole, the flow sensing element, and the outlet hole such that a fluid flowing into the inlet hole flows over the sensing element and out of the outlet hole and wherein the top cap prevents the fluid from contacting the wire bond pads.
Dependencies are inferred from the claim text.