Particle detection sensor, method for manufacturing particle detection sensor, and method for detecting particle using particle detection sensor
AssigneeSemiconductor Energy Laboratory Co., Ltd.
InventorsMayumi Yamaguchi, Konami Izumi, Fuminori Tateishi
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Abstract
A compact sensor with which particles floating in the air can be easily detected. A sensor having a microstructure which detects a detection object by contact is used. A microstructure has an opening to be a detection hole corresponding to the size of a detection object, and a pair of electrodes having a bridge structure are provided thereabove or thereunder so as to partially contact with each other.
Claims30
A particle detection sensor comprising:
- a detector for detecting a detection object by determining whether a pair of electrodes are in contact or out of contact;
- wherein the detector comprises a base having an opening;
- wherein the base with the opening are over the pair of electrodes;
- and
- wherein one of the pair of electrodes overlaps with the other of the pair of electrodes under the opening.
A particle detection sensor comprising:
- a detecting element comprising a pair of electrodes and a base having an opening over the pair of electrodes;
- and
- a circuit for determining whether the pair of electrodes are in contact or out of contact,
- wherein one of the pair of electrodes overlaps with the other of the pair of electrodes under the opening.
A particle detection sensor comprising:
- a detector for detecting a detection object by determining whether the pair of electrodes are in contact or out of contact;
- wherein the detector comprises:
- an insulating layer;
- a pair of electrodes over the insulating layer;
- and
- a base having an opening over the pair of electrodes,
- wherein one of the pair of electrodes overlaps with the other of the pair of electrodes under the opening.
A particle detection sensor comprising:
- a detecting element comprising:
- an insulating layer;
- a pair of electrodes over the insulating layer;
- and
- a base having an opening over the pair of electrodes;
- and
- a circuit for determining whether the pair of electrodes are in contact or out of contact.
A particle detection sensor comprising:
- a detector,
- wherein the detector comprises at least one conductor capable of transforming and a base with an opening;
- and
- wherein the one conductor is under the base and the opening.
A particle detection sensor comprising:
- a detector for detecting a detection object by determining whether a pair of electrodes are in contact or out of contact;
- wherein the detector comprises a base having an opening;
- and
- wherein the base with the opening are over the pair of electrodes.
Dependencies are inferred from the claim text.