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US 7,609,932 B1Granted
Slot waveguide structure
AssigneeHewlett-Packard Development Company, L.P.
InventorSean Spillane
Life of this patent
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Abstract
A nanometer slot waveguide includes a nanometer slot waveguide structure with vertically stacked layers. The vertically stacked layers include a substrate, a first waveguide layer defining a first rail, a spacer layer defining a slot, and a second waveguide layer defining a second rail.
Claims20
A nanometer slot waveguide with vertically stacked layers, wherein the vertically stacked layers comprise:
- a first substrate;
- a first waveguide layer defining a first rail;
- a spacer layer defining a slot;
- and
- a second waveguide layer defining a second rail, wherein the spacer layer defining a slot is located between the first waveguide layer and the second waveguide layer, and wherein a roughness of surfaces of the first and second rails interfacing the slot have substantially atomically flat surfaces.
2 more elements
A method of fabricating a nanometer slot waveguide comprising:
- applying a spacer layer to a first waveguide structure, wherein the first waveguide structure includes a first waveguide layer and a first substrate layer, the first waveguide layer having a refractive index greater than the first substrate layer;
- applying a second waveguide structure to the spacer layer to create an intermediate waveguide structure, wherein the second waveguide structure includes a second waveguide layer, the second waveguide layer having a refractive index greater than the second substrate layer;
- and
- removing portions of the intermediate waveguide structure to create a nanometer slot waveguide structure.
1 more element
A microchannel sensor comprising:
- a microchannel forming a path for the flow of a material;
- and
- a nanometer slot waveguide intersecting the path formed by the microchannel, wherein the nanometer slot waveguide comprises a first waveguide layer defining a first rail, a second waveguide layer defining a second rail, and a slot between the first and second waveguide layers, wherein the material is operable to flow through the path in the microchannel to contact at least a portion of the nanometer slot waveguide.
Dependencies are inferred from the claim text.