Displacement measurements using phase changes
AssigneeHewlett-Packard Development Company, L.P.
InventorsJun Gao, Carl E. Picciotto
Life of this patent
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AssigneeHewlett-Packard Development Company, L.P.
InventorsJun Gao, Carl E. Picciotto
Estimating the term…
A measurement process or system transforms image data corresponding to images of an object to the frequency domain and analyzes the frequency domain data to determine a displacement of the object occurring between first and second images. Analysis in the frequency domain simplifies identification and handling of data expected to be noisy. In particular, frequencies corresponding to modes of vibration, lighting variation, or sensor error characteristic of a measurement system or frequencies corresponding to small magnitude frequency-domain data can be given little or no weighting in analysis that provides the displacement measurement. In one embodiment, Fourier transforms of shifted and unshifted images differ by a phase delay. A least square fit slope of the phase values associated with the phase delay can indicate displacements to accuracies less than 1% of a pixel width, thereby providing nanometer scale precision using imaging systems having a pixel width of about 1 μm.
A method for measuring a displacement, comprising:
A measurement system comprising:
A system for measuring a displacement, comprising:
A computer-readable storage medium containing a set of instructions comprising:
Dependencies are inferred from the claim text.