High brightness—multiple beamlets source for patterned X-ray production
AssigneeThe Regents of the University of California
InventorsKa-Ngo Leung, Qing Ji, William A. Barletta, Ximan Jiang, Lili Ji
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AssigneeThe Regents of the University of California
InventorsKa-Ngo Leung, Qing Ji, William A. Barletta, Ximan Jiang, Lili Ji
Estimating the term…
Techniques for controllably directing beamlets to a target substrate are disclosed. The beamlets may be either positive ions or electrons. It has been shown that beamlets may be produced with a diameter of 1 μm, with inter-aperture spacings of 12 μm. An array of such beamlets, may be used for maskless lithography. By step-wise movement of the beamlets relative to the target substrate, individual devices may be directly e-beam written. Ion beams may be directly written as well. Due to the high brightness of the beamlets from extraction from a multicusp source, exposure times for lithographic exposure are thought to be minimized. Alternatively, the beamlets may be electrons striking a high Z material for X-ray production, thereafter collimated to provide patterned X-ray exposures such as those used in CAT scans. Such a device may be used for remote detection of explosives.
A method of patterned beamlet extraction, comprising:
A device for patterned beamlet extraction comprising:
A device for patterned beamlet extraction comprising:
A device for remote scanning, comprising:
A method of patterned beamlet extraction for the production of X-rays, comprising:
Dependencies are inferred from the claim text.