Method and arrangement for the excitation of a gas laser arrangement
AssigneeHUETTINGER Elektronik GmbH + Co. KG
InventorMichael Glueck
Life of this patent
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Abstract
For exciting a gas laser arrangement with a plurality of HF signals, at least two pulsed HF signals are generated arid at least two electrodes or pairs of electrodes of the gas laser arrangement are supplied with the pulsed HF signals, respectively. At least two of the electrodes or pairs of electrodes are supplied with pulsed HF signals that are phase-shifted with respect to each other.
Claims16
A method for exciting a gas laser arrangement with a plurality of HF signals, the method comprising:
- generating at least two pulsed HF signals;
- supplying at least two electrodes of the gas laser arrangement with the pulsed HF signals, respectively, wherein at least two of the at least two electrodes are supplied with pulsed HF signals that are phase-shifted with respect to each other;
- and
- setting at least one of a duty cycle for at least one of the at least two pulsed HF signals, a pulse frequency for at least one of the at least two pulsed HF signals, and a phase shift between at least two of the at least two pulsed HF signals based on matching an actual power delivered into the gas laser arrangement to a setpoint power to be delivered.
A method for exciting a gas laser arrangement with a plurality of HF signals, the method comprising:
- generating at least two pulsed HF signals, and
- supplying at least two electrodes of the gas laser arrangement with the pulsed HF signals, respectively, wherein at least two of the at least two electrodes are supplied with pulsed HF signals that are phase-shifted with respect to each other, wherein the phase-shifted pulsed HF signals are generated by switching an HF signal time-shifted to different electrodes or pairs of electrodes.
A laser excitation arrangement, comprising:
- a gas laser arrangement with a plurality of electrodes for the power supply of the gas laser arrangement,
- at least two HF generators for generating at least one HF signal, wherein each of the HF generators is connected to one or several electrodes, respectively, and
- at least one pulse device for pulsing HF signals, such that at least two electrodes are supplied with pulsed HF signals that are phase-shifted with respect to each other.
Dependencies are inferred from the claim text.