Thin-film PZT micro-actuator integral with suspension of head gimbal assembly, and disk drive unit with the same

A head gimbal assembly comprising:

• a micro-actuator;
• a slider;
• and
• a suspension including a suspension flexure,
• wherein the micro-actuator includes:
• a support structure including
• a bottom support integral with the suspension flexure,
• a top support that supports the slider, and
• a leading beam that couples the bottom support and the top support, the leading beam including a weak point that allows the top support to rotate about a rotational axis in use;
• and
• a PZT element mounted between the top and bottom supports, the PZT element being excitable to cause selective rotational movement of the top support about the rotational axis in use,
• wherein the PZT element includes a first PZT portion, a second PZT portion, and a coupling portion that couples the first and second PZT portions.

A disk drive device comprising:

• a head gimbal assembly including a micro-actuator, a slider, and a suspension including a suspension flexure;
• a drive arm connected to the head gimbal assembly;
• a disk;
• and
• a spindle motor operable to spin the disk,
• wherein the micro-actuator includes:
• a support structure including
• a bottom support integral with the suspension flexure,
• a top support that supports the slider, and
• a leading beam that couples the bottom support and the top support, the leading beam including a weak point that allows the top support to rotate about a rotational axis in use;
• and
• a PZT element mounted between the top and bottom supports, the PZT element being excitable to cause selective rotational movement of the top support about the rotational axis in use,
• wherein the PZT element includes a first PZT portion, a second PZT portion, and a coupling portion that couples the first and second PZT portions.

A head gimbal assembly comprising:

• a micro-actuator;
• a slider;
• and
• a suspension including a suspension flexure,
• the micro-actuator includes:
• a support structure including
• a bottom support integral with the suspension flexure,
• a top support that supports the slider, and
• a leading beam that couples the bottom support and the top support, the leading beam including a weak point that allows the top support to rotate about a rotational axis in use;
• and
• a PZT element mounted between the top and bottom supports, the PZT element being excitable to cause selective rotational movement of the top support about the rotational axis in use,
• wherein the suspension includes a load beam having a dimple that engages the weak point of the leading beam, and wherein a center of the slider, the weak point, and the dimple are aligned along a common axis.

A method for manufacturing a head gimbal assembly, comprising:

• forming a micro-actuator support structure integral with a suspension flexure;
• applying a bonding material to the micro-actuator support structure;
• aligning a PZT element with the micro-actuator support structure, the PZT element including a first PZT portion, a second PZT portion, and a coupling portion that couples the first and second PZT portions;
• bonding the PZT element to the micro-actuator support structure by the bonding material to physically and electrically connect the PZT element to suspension traces provided on the micro-actuator support structure;
• mounting a slider to the micro-actuator support structure;
• electrically connecting the slider to suspension traces provided on the micro-actuator support structure;
• and
• performing a resistance check and a visual check.