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US 7,609,464 B2Granted
Holding device for an optical element with support force equalization
AssigneeCarl Zeiss SMT GmbH
InventorsKlaus Rief, Yuanbo Kong
Life of this patent
Estimating the term…
Abstract
Holding devices for optical elements, as well as related modules, systems and methods are disclosed. The devices, modules, systems and methods may, for example, be used in the context of microlithography used in manufacturing microelectronic circuits.
Claims42
A device, comprising:
- a ring shaped base element;
- contact elements;
- and
- a connecting device
- wherein:
- the device is configured to hold an optical element;
- the ring shaped base element has a plane of main extension defined by a circumferential direction and a radial direction;
- the contact elements are configured to contact the optical element;
- the contact elements are distributed at a circumference of the base element and connected with the base element so that the contact elements are movable in the radial direction of the base element;
- the contact elements are connected in the circumferential direction of the base element via the connecting device;
- and
- the connecting device couples forces acting on the contact elements in the radial direction of the base element when holding the optical element.
9 more elements
An optical module, comprising:
- a holding device, comprising:
- a ring shaped base element having a plane of main extension being defined by a circumferential direction and a radial direction of the base element;
- and
- contact elements configured to contact the optical element;
- a connecting device;
- and
- an optical element held by the holding device,
- wherein:
- the contact elements are distributed at a circumference of the base element and connected with the base element so that the contact elements are movable in the radial direction of the base element;
- the contact elements are connected in the circumferential direction of the base element the connecting device;
- and
- the connecting device coupling forces acting on the contact elements in the radial direction of the base element when holding the optical element.
9 more elements
A device, comprising:
- a mask device configured to receive a mask comprising a projection pattern;
- a substrate device configured to receive a substrate;
- and
- a projection device, comprising:
- an optical element group configured to project an image of the projection pattern onto the substrate;
- and
- an optical module comprising a holding device and an optical element held by the holding device,
- wherein:
- the holding device comprises:
- a ring shaped base element having a plane of main extension being defined by a circumferential direction and a radial direction of the base element;
- and
- a plurality of contact elements configured to contact the optical element;
- the contact elements are distributed at a circumference of the base element and connected with the base element so that the contact elements are movable in the radial direction of the base element;
- the contact elements are connected in the circumferential direction of the base element via at least one connecting device;
- and
- the connecting device coupling forces acting on the contact elements in the radial direction of the base element when holding the optical element.
13 more elements
A method, comprising:
- holding an optical element via a plurality of contact elements of a holding device distributed at a circumference of the optical element,
- wherein:
- the optical element has a plane of main extension defined by a circumferential direction and a radial direction of the optical element;
- and
- the contact elements are held in such a manner that they are movable in the radial direction of the optical element when coupling the optical element to the holding device;
- and
- via a connecting device connecting the contact elements, a coupling of forces is provided, the forces act on the contact elements in the radial direction of the optical element when holding the optical element.
4 more elements
Dependencies are inferred from the claim text.