MEMS microswitch having a conductive mechanical stop

A MEMS switch comprising:

• a substrate;
• a movable actuator coupled to the substrate;
• a substrate contact;
• a substrate electrode;
• and
• a conductive stopper located on the substrate and electrically coupled to the movable actuator such that the conductive stopper and the movable actuator maintain the same electrical potential.

A MEMS switch comprising:

• a substrate;
• a movable actuator coupled to the substrate and comprising a conductive stopper;
• a substrate contact;
• a substrate electrode;
• and
• a conductive trace electrically coupled to the movable actuator and located on the substrate at least partially below the movable actuator such that the conductive stopper makes electrical contact with the conductive trace and the movable actuator makes electrical contact with the substrate contact when the switch is actuated.

A MEMS switch array formed on a shared substrate comprising:

• a first movable actuator coupled to the substrate;
• a second movable actuator coupled to the substrate;
• a substrate electrode located on the substrate at least partially below the first and second movable actuators;
• a substrate contact located on the substrate at least partially below the first and second movable actuators such that the first and second movable actuators make electrical contact with the substrate contact based upon a state of the substrate electrode;
• and
• at least one conductive stopper electrically coupled to the movable actuators via a conductive trace and structured to prevent the movable actuators from contacting the substrate electrode while allowing the movable actuators to make contact with the substrate contact.