Manufacturing method and controlling method of electronic device
AssigneeEudyna Devices Inc.
InventorsTomohiro Kagiyama, Yasuhiro Tosaka, Norikazu Iwagami
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Abstract
A manufacturing method of an electronic device includes applying a direct voltage having a first polarity to a capacitor that has an insulating layer including nitrogen and silicon as a capacitor dielectric layer, testing the capacitor to which the direct voltage having the first polarity is applied and determining a nondefective capacitor and a defective capacitor, and applying a direct voltage having a second polarity to the nondefective capacitor. The second polarity is opposite to the first polarity.
Claims8
A manufacturing method of an electronic device comprising:
- applying a direct voltage having a first polarity to a capacitor that has an insulating layer including nitrogen and silicon as a capacitor dielectric layer;
- determining a nondefective capacitor and a defective capacitor by testing the capacitor to which the direct voltage having the first polarity is applied;
- and
- applying a direct voltage having a second polarity to the nondefective capacitor, the second polarity being opposite to the first polarity, wherein the capacitor dielectric layer is composed of SiN or SiON.
A controlling method of an electronic device comprising a maintenance step of applying a direct voltage having a second polarity to a capacitor,
- the capacitor having an insulating layer including nitrogen and silicon as a capacitor dielectric layer,
- a test process step in which a direct voltage having a first polarity being applied to the capacitor,
- the second polarity being opposite to the first polarity, wherein the capacitor dielectric layer is composed of SiN or SiON.
A manufacturing method of an electronic device comprising in order:
- applying a direct voltage having a first polarity to a capacitor that has an insulating layer including nitrogen and silicon as a capacitor dielectric layer;
- applying a direct voltage having a second polarity to the capacitor, the second polarity being opposite to the first polarity;
- and
- testing the capacitor and determining a nondefective capacitor and a defective capacitor wherein the capacitor dielectric layer is composed of SiN or SiON.
Dependencies are inferred from the claim text.