Vacuum device having non-evaporable getter component with increased exposed surface area

A vacuum device, comprising:

• means for supporting a non-evaporable alloy thin film getter over a substrate comprising a base non-evaporable getter layer disposed thereon, said non-evaporable alloy thin film getter having an exposed surface, having a thickness less than or equal to 20micrometers, and having a substrate facing surface;
• and
• means for exposing said substrate facing surface to a vacuum, wherein said means for supporting, said means for exposing, and said non-evaporable alloy thin film getter are integrally formed over said substrate.

A vacuum device, comprising:

• a support structure formed from a non-evaporable getter alloy, said support structure having a support perimeter, having at least one sidewall exposed to a vacuum, and disposed over a substrate;
• and
• a non-evaporable getter layer having an exposed surface area, said non-evaporable getter layer disposed over said support structure, and extending beyond said support perimeter in at least one direction of said support structure forming a vacuum gap between said substrate and said non-evaporable getter layer, increasing said exposed surface area.