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US 7,608,903 B2Granted
Image sensor with SOI substrate
AssigneeAptina Imaging Corporation
InventorChandra Mouli
Life of this patent
Estimating the term…
Abstract
An imager pixel utilizing a silicon-on-insulator substrate, a photodiode in said substrate below the buried oxide, and a dual contact to said photodiode and methods of forming said imager pixel. The photodiode has an increased fill factor due to its increased size relative to the pixel.
Claims20
An imager pixel, comprising:
- a silicon-on-insulator substrate comprising a lower substrate portion, a buried oxide over the lower substrate portion, and a silicon layer over the buried oxide;
- a photodiode in the lower substrate portion, wherein the pixel has an area dimension with respect to the substrate, and the photodiode substantially spans the entire pixel area dimension;
- a dual contact comprising a first contact plug to the photodiode and a second contact plug extending to the lower substrate portion adjacent the photodiode;
- and
- a conductive strap connecting the first contact plug with the second contact plug.
2 more elements
A CMOS imager, comprising:
- a silicon-on-insulator substrate comprising a lower substrate portion, a buried oxide over the lower substrate portion, and a silicon layer over the buried oxide;
- an isolation region in the silicon layer, the isolation region defining a pixel area;
- a pinned photodiode in the lower substrate portion;
- a pixel circuit comprising a plurality of transistors supported by the silicon layer;
- a dual contact from a transfer transistor to a charge collection region of the photodiode, the dual contact having a first contact penetrating the lower substrate portion to the charge collection region and a second contact penetrating the isolation region and lower substrate portion adjacent the photodiode;
- and
- a conductive strap connecting the first contact and the second contact of the dual contact.
4 more elements
A processor system, comprising:
- an imager coupled to a processor, the imager comprising an array of pixels, each pixel comprising:
- a silicon-on-insulator substrate comprising a lower substrate portion, a buried oxide over the lower substrate portion, and a silicon layer over the buried oxide;
- and
- a pinned photodiode in the lower substrate portion, wherein the pixel has an area dimension with respect to the substrate and the photodiode substantially spans the entire pixel area dimension;
- a first contact through the silicon layer and buried oxide to the pinned photodiode;
- a second contact through the silicon layer and buried oxide to the lower substrate portion outside the pinned photodiode;
- and
- a conductive strap connecting the first contact with the second contact.
5 more elements
Dependencies are inferred from the claim text.