Lateral diffusion metal-oxide-semiconductor structure
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsDah-Chuen Ho, Chien-Shao Tang, Zhe-Yi Wang, Yu-Chang Jong
Life of this patent
Estimating the term…
Loading patent…
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsDah-Chuen Ho, Chien-Shao Tang, Zhe-Yi Wang, Yu-Chang Jong
Estimating the term…
A lateral diffusion metal-oxide-semiconductor (LDMOS) structure comprises a gate, a source, a drain and a shallow trench isolation. The shallow trench isolation is formed between the drain and the gate to withstand high voltages, applied to the drain, and is associated with the semiconductor substrate to form a recess. As such, the surface of the shallow trench isolation is lower than the surface of the semiconductor substrate. Optionally, the surface of the shallow trench isolation is lower than the surface of the semiconductor substrate by 300-1500 angstroms.
A lateral diffusion metal-oxide-semiconductor (LDMOS) structure, comprising:
A LDMOS structure, comprising:
A LDMOS structure, comprising:
Dependencies are inferred from the claim text.