Extreme ultra violet light source device

An extreme ultra violet light source device for generating extreme ultra violet light by irradiating a target material with a laser beam emitted from a laser light source to turn the target material into a plasma state, said device comprising:

• a first chamber;
• a second chamber connected to said first chamber through an opening portion;
• a target supplier that supplies a target material into said first chamber;
• droplet generating means provided in said first chamber, said droplet generating means generating droplets of the target material of molten metal such that the droplets repetitively drop based on the target material supplied by said target supplier;
• blocking means that prevents the droplets of the target material generated by said droplet generating means from passing through said opening portion, said blocking means including a blocking member to be inserted into a path of the droplets of the target material, and displacing means that changes at least one of a position and an angle of said blocking member;
• heating means provided at said blocking member, said heating means heating said blocking member;
• control means that controls said blocking means to operate at predetermined timing;
• a laser light source that generates a laser beam;
• and
• an optical system that leads the laser beam generated by said laser light source to the droplets of the target material generated in said first chamber and introduced into said second chamber through said opening portion.

An extreme ultra violet light source device for generating extreme ultra violet light by irradiating a target material with a laser beam emitted from a laser light source to turn the target material into a plasma state, said device comprising:

• a first chamber;
• a second chamber connected to said first chamber through an opening portion;
• a target supplier that supplies a target material into said first chamber;
• droplet generating means provided in said first chamber, said droplet generating means generating droplets of the target material of molten metal such that the droplets repetitively drop based on the target material supplied by said target supplier;
• blocking means that emits a laser beam for irradiating the droplets of the target material generated by said droplet generating means, and propagates the laser beam into a path of the droplets of the target material in said first chamber to prevent the droplets of the target material from passing though said opening portion;
• control means that controls said blocking means to operate at predetermined timing;
• a laser light source that generates a laser beam;
• and
• an optical system that leads the laser beam generated by said laser light source to the droplets of the target material generated in said first chamber and introduced into said second chamber through said opening portion.

An extreme ultra violet light source device for generating extreme ultra violet light by irradiating a target material with a laser beam emitted from a laser light source to turn the target material into a plasma state, said device comprising:

• a first chamber;
• a second chamber connected to said first chamber through an opening portion;
• a target supplier that supplies a target material into said first chamber;
• droplet generating means provided in said first chamber, said droplet generating means generating droplets of the target material of molten metal such that the droplets repetitively drop based on the target material supplied by said target supplier;
• blocking means that prevents the droplets of the target material generated by said droplet generating means from passing through said opening portion;
• control means that controls said blocking means to operate at predetermined timing;
• a laser light source that generates a laser beam;
• and
• an optical system that leads the laser beam generated by said laser light source to the droplets of the target material generated in said first chamber and introduced into said second chamber through said opening portion,
• wherein said blocking means includes:
• (i) a nozzle for injecting a high pressure gas to be sprayed to the droplets of the target material;
• (ii) a gas supplier that supplies the high pressure gas to said nozzle;
• and
• (iii) shutter means that blocks the high pressure gas injected from said nozzle from the droplets of the target material.

An extreme ultra violet light source device for generating extreme ultra violet light by irradiating a target material with a laser beam emitted from a laser light source to turn the target material into a plasma state, said device comprising:

• a first chamber:
• a second chamber connected to said first chamber through an opening portion;
• a target supplier that supplies a target material into said first chamber, said target supplier including a nozzle for injecting the target material;
• droplet generating means provided in said first chamber, said droplet generating means generating droplets of the target material of molten metal such that the droplets repetitively drop based on the target material supplied by said target supplier;
• blocking means that causes a path of the droplets of the target material injected from said nozzle to shift from said opening portion by changing one of a position and an angle of said nozzle to prevent the droplets of the target material from passing through said opening portion;
• control means that controls said blocking means to operate at predetermined timing;
• a laser light source that generates a laser beam;
• and
• an optical system that leads the laser beam generated by said laser light source to the droplets of the target material generated in said first chamber and introduced into said second chamber through said opening portion.

An extreme ultra violet light source device for generating extreme ultra violet light by irradiating a target material with a laser beam emitted from a laser light source to turn the target material into a plasma state, said device comprising:

• a first chamber;
• a second chamber connected to said first chamber through an opening portion;
• a target supplier that supplies a target material into said first chamber;
• droplet generating means provided in said first chamber said droplet generating means generating droplets of the target material of molten metal such that the droplets repetitively drop based on the target material supplied by said target supplier;
• blocking means that prevents the droplets of the target material generated by said droplet generating means from passing through said opening portion:
• control means that controls said blocking means to operate at predetermined timing;
• a laser light source that generates a laser beam;
• and
• an optical system that leads the laser beam generated by said laser light source to the droplets of the target material generated in said first chamber and introduced into said second chamber through said opening portion,
• wherein said first chamber and said second chamber are connected via an opening portion provided to a deformable member, and
• said blocking means includes deforming means that deforms said deformable member such that said opening portion is shifted from a path of the droplets of the target material.