Method and apparatus for scanning a workpiece through an ion beam

An apparatus for scanning a workpiece through an ion beam path, comprising:

• an elongated member adapted to mount a workpiece within an ion beam path at one end of the elongated member;
• a rotational mechanism mounting the elongated member at a point of rotation located on the elongated member away from the one end and further adapted to repetitively scan the one end along an arcuate path defining an imaginary plane by partial repetitive rotation of the rotational mechanism and the elongated member for scanning a workpiece mounted on the one end through the ion beam path;
• wherein the elongated member includes a joint located between the one end and the point of rotation and adapted to allow bending of the elongated member to move the one end out of the imaginary plane of the arcuate path to facilitate attachment and removal of individual workpieces at the one end;
• an enclosure located around the elongated member and the rotational mechanism and adapted to maintain a partial vacuum therein;
• and
• a mechanism suspending the elongated member and rotational mechanism against gravity within the enclosure and adapted to cause linear movement of the rotational mechanism and the elongated member upwardly and downwardly to cause different portions of a workpiece mounted on the one end to pass though the ion beam path during repetitive scans.

An apparatus for scanning a workpiece through an ion beam path, comprising:

• an elongated member adapted to mount a workpiece within an ion beam path at one end of the elongated member;
• a rotational mechanism mounting the elongated member at a point of rotation located on the elongated member away from the one end and further adapted to repetitively scan the one end along an arcuate path defining an imaginary plane by partial repetitive rotation of the rotational mechanism and the elongated member for scanning a workpiece mounted on the one end through the ion beam path;
• wherein the elongated member includes a joint located between the one end and the point of rotation and adapted to allow bending of the elongated member to move the one end out of the imaginary plane of the arcuate path to facilitate attachment and removal of individual workpieces at the one end;
• and
• a bias mechanism adapted to bias the elongated member around the joint to an extended position of the one end positioned within the ion beam path;
• and
• an engagement mechanism adapted to selectively engage a portion of the elongated member between the one end and the joint,
• wherein the selectively engageable portion of the elongated member is adapted to cause bending of the elongated member at the joint in response to linear movement of the elongated member when selectively engaged by the engagement mechanism.

An apparatus for scanning a workpiece through an ion beam path, comprising:

• an elongated member adapted to mount a workpiece within an ion beam path at one end of the elongated member;
• and
• a rotational mechanism mounting the elongated member at a point of rotation located on the elongated member away from the one end and further adapted to repetitively scan a workpiece mounted on the one end through the ion beam path along an arcuate path by partial repetitive rotation of the rotational mechanism and the elongated member;
• an enclosure located around the elongated member and the rotational mechanism and adapted to maintain a partial vacuum therein;
• and
• a mechanism suspending the elongated member and rotational mechanism against gravity within the enclosure and adapted to cause linear movement of the rotational mechanism and the elongated member upwardly and downwardly to cause different portions of a workpiece mounted on the one end to pass through the ion beam path during repetitive scans.

A method for scanning a workpiece through an ion beam path, comprising the steps of:

• mounting a workpiece within an ion beam path at one end of an elongated member;
• partially, repetitively rotating the elongated member around a point of rotation on the elongated member and away from the workpiece with an electric motor mounting the elongated member to make repetitive scans of the workpiece through the ion beam path along an arcuate path;
• maintaining a partial vacuum within an enclosure located around the elongated member and the electric motor;
• and
• moving the elongated member upwardly or downwardly to cause different portions of the workpiece to pass through the ion beam path during the repetitive scans,
• wherein the step of moving the elongated member includes suspending the electric motor and elongated member against gravity and thereby raising and lowering the electric motor and elongated member.