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US 7,608,838 B1Granted
Electron optical component
OwnerRaymond Browninginventor
Life of this patent
Estimating the term…
Abstract
An electron optical component used to improve the spatial resolution in magnetic projection electron lenses or other electron optical devices by filtering the cyclotron orbit radii of electron trajectories in the lens magnetic field.
Claims4
A charged particle optical device comprising:
- (a) a first means having a magnetic field;
- (b) a conducting plate with a plurality of apertures;
- (c) said apertures having similar predetermined dimensions;
- (d) said apertures sit within said magnetic field with said apertures depths being approximately aligned to the direction of said magnetic field;
- (e) a second means to change a forward distance for one cyclotron orbit of charged particles so that said forward distance for one cyclotron orbit of said charged particles is similar to said aperture depths;
- whereby cyclotron orbit radii of said charged particles traveling within said magnetic field are filtered by said dimensions of said apertures.
3 more elements
A method of filtering cyclotron orbital radii, comprising:
- (a) providing a magnetic field means;
- (b) providing a conducting plate with a plurality of apertures;
- (c) said apertures having similar predetermined dimensions;
- (d) said apertures sit within said magnetic field with said apertures depths being approximately aligned to the direction of said magnetic field;
- (e) providing a second means to change a forward distance for one cyclotron orbit of charged particles so that said forward distance for one cyclotron orbit of said charged particles is similar to said aperture depths;
- whereby cyclotron orbit radii of said charged particles traveling within said magnetic field are filtered by said dimensions of said apertures.
3 more elements
Dependencies are inferred from the claim text.