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US 7,608,235 B2Granted
Carbon electrode for generation of nitrogen trifluoride gas
AssigneesToyo Tanso Co., Ltd., Mitsui Chemicals, Inc.
InventorsAkimasa Tasaka, Masashi Kodama, Udai Tanaka, Hitoshi Takebayashi, Tetsuro Tojo, Atsuhisa Mimoto
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Abstract
A carbon electrode for producing gaseous nitrogen trifluoride comprising a dense texture with an average pore size of 0.5 μm or less is provided. The carbon electrode contains a carbonaceous material, and 3 to 10 wt % of at least one selected from magnesium fluoride and aluminum fluoride which have a melting point not lower than the baking temperature of the carbonaceous material.
Claims2
A carbon electrode for producing gaseous nitrogen trifluoride, comprising
- a carbonaceous material, and
- at least one metal fluoride selected from the group consisting of magnesium fluoride and aluminum fluoride, wherein
- the carbon electrode has a dense structure comprising an average pore size of 0.5 μm or less,
- the at least one metal fluoride is contained in the structure of the carbon electrode,
- a melting point of the selected metal fluoride is not lower than a baking temperature of the carbonaceous material, and
- a content of the selected metal fluoride is 3 to 10 wt %.
3 more elements
Dependencies are inferred from the claim text.