Light deflector, light deflection array, optical system, image forming device, and projection type image display apparatus

A light deflection array wherein a plurality of light deflectors is arranged in one dimension or two dimensions,

• the light deflector comprising:
• a substrate;
• a plurality of control members provided at edge parts of the substrate, the control members having upper parts where stoppers are situated;
• a fulcrum member provided on an upper surface of the substrate, the fulcrum member having a top part;
• a plate-shaped member movably provided in a space formed by the substrate, the fulcrum member, and the stoppers, the plate-shaped member having a light reflection area and no fixed end;
• and
• a plurality of electrodes provided on the substrate, the electrodes facing the plate-shaped member;
• wherein the plate-shaped member is tilted and displaced by an electrostatic attraction force in a state where the fulcrum member is a center, so that a reflection direction of a light flux incident on the light reflection area is changed and thereby light deflection is performed;
• and
• wherein the substrate includes a contact part formed thereon which contacts the plate-shaped member, the contact part including an upper layer and a lower layer, and the upper layer and not the lower layer is made of a main ingredient which is a high melting point metal element.

An optical system, comprising:

• a light deflection array;
• a light source configured to light the light deflection array;
• and
• a projection lens configured to project a reflection light from the light deflection array as corresponding to color information;
• wherein the light deflection array has a plurality of light deflectors which light deflectors are arranged in one dimension or two dimensions,
• the light deflector including:
• a substrate;
• a plurality of control members provided at edge parts of the substrate, the control members having upper parts where stoppers are situated;
• a fulcrum member provided on an upper surface of the substrate, the fulcrum member having a top part;
• a plate-shaped member movably provided in a space formed by the substrate, the fulcrum member, and the stoppers, the plate-shaped member having a light reflection area and no fixed end;
• and
• a plurality of electrodes provided on the substrate, the electrodes facing the plate shaped member;
• wherein the plate-shaped member is tilted and displaced by an electrostatic attraction force in a state where the fulcrum member is a center, so that a reflection direction of a light flux incident on the light reflection area is changed and thereby light deflection is performed;
• and
• wherein the substrate includes a contact part formed thereon which contacts the plate-shaped member, the contact part including an upper layer and a lower layer, and the upper layer and not the lower layer is made of a main ingredient which is a high melting point metal element.

A projection type image display apparatus using an optical system as a projection optical system,

• the optical system comprising:
• a light deflection array;
• a light source configured to light the light deflection array;
• and
• a projection lens configured to project a reflection light from the light deflection array as corresponding to color information;
• wherein the light deflection array has a plurality of light deflectors which light deflectors are arranged in one dimension or two dimensions,
• the light deflector including:
• a substrate;
• a plurality of control members provided at edge parts of the substrate, the control members having upper parts where stoppers are situated;
• a fulcrum member provided on an upper surface of the substrate, the fulcrum member having a top part;
• a plate-shaped member movably provided in a space formed by the substrate, the fulcrum member, and the stoppers, the plate-shaped member having a light reflection area and no fixed end;
• and
• a plurality of electrodes provided on the substrate, the electrodes facing the plate shaped member;
• wherein the plate-shaped member is tilted and displaced by an electrostatic attraction force in a state where the fulcrum member is a center, so that a reflection direction of a light flux incident on the light reflection area is changed and thereby light deflection is performed;
• and
• wherein the substrate includes a contact part formed thereon which contacts the plate-shaped member, the contact part including an upper layer and a lower layer, and the upper layer and not the lower layer is made of a main ingredient which is a high melting point metal element.

A projection type image display apparatus using an optical system as a optical writing unit,

• the optical system comprising:
• a light deflection array;
• a light source configured to light the light deflection array;
• and
• a projection lens configured to project a reflection light from the light deflection array as corresponding to color information;
• wherein the light deflection array has a plurality of light deflectors which light deflectors are arranged in one dimension or two dimensions,
• the light deflector including:
• a substrate;
• a plurality of control members provided at edge parts of the substrate, the control members having upper parts where stoppers are situated;
• a fulcrum member provided on an upper surface of the substrate, the fulcrum member having a top part;
• a plate-shaped member movably provided in a space formed by the substrate, the fulcrum member, and the stoppers, the plate-shaped member having a light reflection area and no fixed end;
• and
• a plurality of electrodes provided on the substrate, the electrodes facing the plate-shaped member;
• wherein the plate-shaped member is tilted and displaced by an electrostatic attraction force in a state where the fulcrum member is a center, so that a reflection direction of a light flux incident on the light reflection area is changed and thereby light deflection is performed;
• and
• wherein the substrate includes a contact part formed thereon which contacts the plate-shaped member, the contact part including an upper layer and a lower layer, and the upper layer and not the lower layer is made of a main ingredient which is a high melting point metal element.

A light deflector, comprising:

• a substrate;
• a plurality of control members provided at edge parts of the substrate, the control members having upper parts where stoppers are situated;
• a fulcrum member provided on an upper surface of the substrate, the fulcrum member having a top part;
• a plate-shaped member movably provided in a space formed by the substrate, the fulcrum member, and the stoppers, the plate-shaped member having a light reflection area and no fixed end;
• and
• a plurality of electrodes provided on the substrate, the electrodes facing the plate shaped member;
• wherein the plate-shaped member is tilted and displaced by an electrostatic attraction force where the fulcrum member is a center, so that a reflection direction of a light flux incident on the light reflection area is changed and thereby light deflection is performed;
• and
• wherein the plate-shaped member includes an upper layer and a lower layer, the lower layer contacting a contact part of the substrate, and the lower layer and not the upper layer is made of a main ingredient which is a high melting point metal element.

A light deflection array wherein a plurality of light deflectors is arranged in one dimension or two dimensions,

• the light deflector comprising:
• a substrate;
• a plurality of control members provided at edge parts of the substrate, the control members having upper parts where stoppers are situated;
• a fulcrum member provided on an upper surface of the substrate, the fulcrum member having a top part;
• a plate-shaped member movably provided in a space formed by the substrate, the fulcrum member, and the stoppers, the plate-shaped member having a light reflection area and no fixed end;
• and
• a plurality of electrodes provided on the substrate, the electrodes facing the plate-shaped member;
• wherein the plate-shaped member is tilted and displaced by an electrostatic attraction force in a state where the fulcrum member is a center, so that a reflection direction of a light flux incident on the light reflection area is changed and thereby light deflection is performed;
• and
• wherein the plate-shaped member includes an upper layer and a lower layer, the lower layer contacting a contact part of the substrate, and the lower layer and not the upper layer is made of a main ingredient which is a high melting point metal element.

An optical system, comprising:

• a light deflection array;
• a light source configured to light the light deflection array;
• and
• a projection lens configured to project a reflection light from the light deflection array as corresponding to color information;
• wherein the light deflection array has a plurality of light deflectors which light deflectors are arranged in one dimension or two dimensions,
• the light deflector including:
• a substrate;
• a plurality of control members provided at edge parts of the substrate, the control members having upper parts where stoppers are situated;
• a fulcrum member provided on an upper surface of the substrate, the fulcrum member having a top part;
• a plate-shaped member movably provided in a space formed by the substrate, the fulcrum member, and the stoppers, the plate-shaped member having a light reflection area and no fixed end;
• and
• a plurality of electrodes provided on the substrate, the electrodes facing the plate-shaped member;
• wherein the plate-shaped member is tilted and displaced by an electrostatic attraction force where the fulcrum member is a center, so that a reflection direction of a light flux incident on the light reflection area is changed and thereby light deflection is performed;
• and
• wherein the plate-shaped member includes an upper layer and a lower layer, the lower layer contacting a contact part of the substrate, and the lower layer and not the upper layer is made of a main ingredient which is a high melting point metal element.

A projection type image display apparatus using an optical system as a projection optical system,

• the optical system comprising:
• a light deflection array;
• a light source configured to light the light deflection array;
• and
• a projection lens configured to project a reflection light from the light deflection array as corresponding to color information;
• wherein the light deflection array has a plurality of light deflectors which light deflectors are arranged in one dimension or two dimensions,
• the light deflector including:
• a substrate;
• a plurality of control members provided at edge parts of the substrate, the control members having upper parts where stoppers are situated;
• a fulcrum member provided on an upper surface of the substrate, the fulcrum member having a top part;
• a plate-shaped member movably provided in a space formed by the substrate, the fulcrum member, and the stoppers, the plate-shaped member having a light reflection area and no fixed end;
• and
• a plurality of electrodes provided on the substrate, the electrodes facing the plate shaped member;
• wherein the plate-shaped member is tilted and displaced by an electrostatic attraction force in a state where the fulcrum member is a center, so that a reflection direction of a light flux incident on the light reflection area is changed and thereby light deflection is performed;
• and
• wherein the plate-shaped member includes an upper layer and a lower layer, the lower layer contacting a contact part of the substrate, and the lower layer and not the upper layer is made of a main ingredient which is a high melting point metal element.

A projection type image display apparatus using an optical system as a optical writing unit,

• the optical system comprising:
• a light deflection array;
• a light source configured to light the light deflection array;
• and
• a projection lens configured to project a reflection light from the light deflection array as corresponding to color information,
• wherein the light deflection array has a plurality of light deflectors which light deflectors are arranged in one dimension or two dimensions,
• the light deflector including:
• a substrate;
• a plurality of control members provided at edge parts of the substrate, the control members having upper parts where stoppers are situated;
• a fulcrum member provided on an upper surface of the substrate, the fulcrum member having a top part;
• a plate-shaped member movably provided in a space formed by the substrate, the fulcrum member, and the stoppers, the plate-shaped member having a light reflection area and no fixed end;
• and
• a plurality of electrodes provided on the substrate, the electrodes facing the plate shaped member;
• wherein the plate-shaped member is tilted and displaced by an electrostatic attraction force in a state where the fulcrum member is a center, so that a reflection direction of a light flux incident on the light reflection area is changed and thereby light deflection is performed;
• and
• wherein the plate-shaped member includes an upper layer and a lower layer, the lower layer contacting a contact part of the substrate, and the lower layer and not the upper layer is made of a main ingredient which is a high melting point metal element.