Reticle pod with isolation system

Apparatus for supporting a substrate to provide shock and vibration isolation, the apparatus comprising:

• a pod including a cover and a base, the cover configured with a concave inner surface and adapted to removably engage the base to define a sealed enclosure between the concave surface and the base, the base having an interior with a latch mechanism contained therein, the base further having an upwardly facing surface with an outer edge portion and having a groove therein extending along the outer edge portion, the apparatus further comprising an elastomeric seal configured in a loop positioned in the groove, and
• wherein the seal has a top surface with two cantilevered portions and a middle portion, and wherein the top cover has an outer periphery with three engagement ribs extending around the outer periphery, and wherein the three engagement ribs engage the two cantilevered portions and the middle portion providing a continuous engagement providing a sealing engagement between the cover and base.

Container for supporting a reticle to provide shock and vibration isolation, the container comprising:

• a primary pod including a cover and a door latchable to the cover,
• a secondary pod comprising a lower portion and an upper portion, the upper portion adapted to engage the lower portion to define a second enclosure for containing the reticle, the lower portion comprising support structure to hold a substrate thereupon and the upper portion comprising retaining structure for retaining the substrate when the upper portion is engaged with the lower portion;
• a plurality of resilient couplings extending upwardly from the door of the primary pod to the lower portion of the secondary pod and an additional plurality of resilient couplings extending downwardly from the cover of the primary pod to the upper portion of the secondary pod, whereby the plurality of resilient couplings extending upwardly and the additional plurality extending downwardly provide exclusive resilient support of the secondary pod, including the lower portion and the upper portion.