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US 7,607,356 B2Granted
Pirani vacuum gauge
AssigneeUlvac, Inc.
InventorsTakeshi Miyashita, Naoki Takahashi
Life of this patent
Estimating the term…
Abstract
A Pirani vacuum gauge in which dependency of temperature of a filament on variation of gas pressure is raised and the gas pressure can be measured with high accuracy. The Pirani vacuum gauge includes a cylindrical body 2 in which the interior communicates with a space to be measured for pressure; a filament 1 enclosed in the cylindrical body 2; and a pipe 7 surrounding the filament 1 in the cylindrical body, the least distance between the facing inner walls of the pipe being equal to less than 6 mm and the pipe 7 covering more than 80% of the length of the filament 1.
Claims10
A Pirani vacuum gauge comprising:
- a cylindrical body in which the interior communicates with a space to be measured for pressure;
- a filament included in said cylindrical,
- a pipe surrounding said filament in said cylindrical body whereby said filament passes through a central axis of said pipe, the least distance between facing inner walls of said pipe being equal to less than 4 mm and said pipe covering more than 80% of the length of said filament;
- and a filament support included in said cylindrical body and supporting one end of said filament.
1 more element
Dependencies are inferred from the claim text.