Process for producing sublithographic structures

A process for producing sublithographic structures, comprising:

• a) preparing a carrier layer;
• b) forming a first auxiliary layer over a surface of the carrier layer;
• c) forming a lithographically patterned second auxiliary layer structure on a surface of the first auxiliary layer, the second auxiliary layer structure comprises a lithographic auxiliary layer structure and a spacer structure formed at a sidewall of the lithographic auxiliary layer structure;
• d) anisotropically etching the first auxiliary layer using the patterned second auxiliary layer structure as a mask, down to the carrier layer, to form an anisotropically patterned first auxiliary layer structure;
• e) isotropically etching back the anisotropically patterned first auxiliary layer structure using the patterned second auxiliary layer structure to remove subsections below the second auxiliary layer structure and to form an isotropically patterned first auxiliary layer structure;
• f) forming a mask layer over the carrier layer including the subsections beneath the second auxiliary layer structure;
• g) anisotropically etching the mask layer down to the carrier layer to form the sublithographic structures;
• and
• h) removing the first and second auxiliary layer structures to uncover the sublithographic structures.