Method for coating internal member having holes in vacuum processing apparatus and the internal member having holes coated by using the coating method

A coating method for forming a coating film of ceramic material on a surface of an internal member disposed in a vacuum processing apparatus, the internal member having holes formed on the surface, the method comprising:

• a step (A) of filling the holes of the internal member with padding plugs each of which has a core member made from a metal material and a metal-resin composite layer covering the circumferential surface of the core member, the metal-resin composite layer being a complex consisting of a metal material and a resinous material exhibiting nonconjugative property to the coating film;
• a step (B) of forming a ceramic coating film on the surface of the internal member by means of plasma spraying after the step (A);
• and
• a step (C) of extracting the padding plugs out of the holes of the internal member after the step (B).