Sensor for lithographic apparatus and method of obtaining measurements of lithographic apparatus

A sensor arrangement comprising:

• a substrate;
• and
• a plurality of components comprising:
• i) at least one sensor element provided as an integrated circuit in the substrate;
• ii) a processing circuit connected to the at least one sensor element;
• iii) an input/output interface connected to the processing circuit;
• and
• iv) a power supply unit said power supply unit configured to supply operating power to at least one other component of the sensor arrangement, wherein the power supply unit is arranged to convert a wireless signal having a first predetermined frequency into a supply voltage for a first part of the sensor arrangement and to convert wireless energy having a second predetermined frequency into a supply voltage for a second part of the sensor arrangement different from the first part.

A lithographic apparatus comprising:

• a substrate;
• and
• one or more sensor arrangements, each sensor arrangement having:
• i) a plurality of sensor elements, each sensor element provided as an integrated circuit in the substrate and associated with electronic circuitry that comprises:
• a) a processing circuit arranged on the substrate and connected to at least one of the sensor elements, the processing circuit being configured to process a signal generated by the at least one of the sensor elements;
• and
• b) an input/output interface arranged on the substrate and connected to the processing circuit;
• and
• ii) a power supply unit arranged on the substrate and configured to supply operating power only to electronic circuitry associated with one or more of the plurality of sensor elements which are in use.

A lithographic apparatus comprising:

• a sensor arrangement comprising:
• a substrate;
• and
• a plurality of components comprising:
• at least one sensor element provided as an integrated circuit in the substrate;
• a processing circuit connected to the at least one sensor element;
• an input/output interface connected to the processing circuit;
• and
• a power supply unit configured to supply operating power to at least one other component of the sensor arrangement, wherein the power supply unit is arranged to convert a wireless signal having a first predetermined frequency into a supply voltage for a first part of the sensor arrangement and to convert wireless energy having a second predetermined frequency into a supply voltage for a second part of the sensor arrangement different from the first part, and
• a projection system configured to project a patterned beam of radiation onto a target portion of the substrate, wherein the sensor arrangement is arranged to measure an aberration of the projection system.

A method for measuring optical properties of a device arranged to process substrates, comprising:

• introducing a sensor arrangement in the device and positioning the sensor arrangement in a measurement position;
• executing measurements using the sensor arrangement;
• and
• removing the sensor arrangement from the device, wherein the sensor arrangement comprises:
• i) a substrate;
• ii) a plurality of sensor elements, each sensor element provided as an integrated circuit in the substrate and associated with electronic circuitry comprising that comprises:
• a) a processing circuit arranged on the substrate and connected to at least one of the sensor elements, the processing circuit being configured to process a signal generated by the at least one of the sensor elements;
• and
• b) an input/output interface arranged on the substrate and connected to the processing circuit;
• and
• ii) a power supply unit arranged on the substrate and configured to supply operating power only to electronic circuitry associated with one or more of the plurality of sensor elements which are in use.

A method for measuring properties, of a device arranged to process substrates, comprising:

• introducing a sensor arrangement into the device and positioning the sensor arrangement in a measurement position;
• executing measurements using the sensor arrangement;
• and
• removing the sensor arrangement from the device,
• wherein the sensor arrangement comprises:
• a substrate;
• and
• at least one sensor element provided as an integrated circuit in the substrate;
• a processing circuit connected to the at least one sensor element;
• an input/output interface connected to the processing circuit;
• and
• a power supply unit configured to supply operating power to at least one other component of the sensor arrangement, wherein the power supply unit is arranged to convert a wireless signal having a first predetermined frequency into a supply voltage for a first part of the sensor arrangement and to convert wireless energy having a second predetermined frequency into a supply voltage for a second part of the sensor arrangement different from the first part.

A sensor arrangement comprising:

• a substrate;
• a plurality of sensor elements, each sensor element provided as an integrated circuit in the substrate;
• and
• electronic circuitry comprising:
• i) a processing circuit arranged on the substrate and connected to at least one of the sensor elements, the processing circuit being configured to process a signal generated by the at least one of the sensor elements;
• ii) an input/output interface arranged on the substrate and connected to the processing circuit;
• and
• iii) a power supply unit arranged on the substrate and configured to supply operating power to a processing circuit associated with one or more of the plurality of sensor elements which are in use.