Ferroelectric memory and ferroelectric capacitor with Ir-alloy electrode or Ru-alloy electrode and method of manufacturing same
AssigneeSamsung Electronics Co., Ltd.
InventorsJune-mo Koo, Young-soo Park, Sang-min Shin, Suk-pil Kim
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Abstract
A ferroelectric capacitor comprises a first electrode comprising an alloy containing a first element and a second element of the periodic table of the elements, the first element being selected from the group consisting of Ir and Ru. A ferroelectric layer is disposed on the first electrode, wherein the ferroelectric layer comprises a ferroelectric material containing the second element. A second electrode is disposed on the ferroelectric layer. The ferroelectric capacitor can be provided as part of a memory cell of a ferroelectric memory.
Claims22
A ferroelectric capacitor, comprising:
- a first electrode comprising a compound, the compound consisting essentially of an Ir—Ti alloy or a Ru—Ti alloy, and the compound including a first metallic element and a second metallic element of the periodic table of the elements, the first metallic element being selected from the group consisting of Ir and Ru;
- a ferroelectric layer disposed in direct contact with the compound of the first electrode, wherein the ferroelectric layer comprises a ferroelectric material containing the second metallic element, the second metallic element is Ti;
- and
- a second electrode disposed on the ferroelectric layer.
A ferroelectric memory, comprising:
- a substrate;
- and
- a plurality of memory cells arranged on the substrate, each memory cell comprising
- a first electrode comprising a compound, the compound consisting essentially of an Ir—Ti alloy or a Ru—Ti alloy, and the compound including a first metallic element and a second metallic element of the periodic table of the elements, the first metallic element being selected from the group consisting of Ir and Ru,
- a ferroelectric layer disposed in direct contact with the compound of the first electrode, wherein the ferroelectric layer comprises a ferroelectric material containing the second metallic element, the second metallic element is Ti, and
- a second electrode disposed on the ferroelectric layer.
A method of fabricating a ferroelectric capacitor, comprising:
- forming a first electrode consisting essentially of a compound, the compound comprising an Ir—Ti alloy or a Ru—Ti alloy, and the compound including a first metallic element and a second metallic element of the periodic table of the elements, the first metallic element being selected from the group consisting of Ir and Ru;
- forming a ferroelectric layer on the first electrode, wherein the ferroelectric layer comprises a ferroelectric material containing the second metallic element, the second metallic element is Ti;
- and
- forming a second electrode on the ferroelectric layer.
Dependencies are inferred from the claim text.