Method of controlling mover device

A method of controlling a mover device that includes:

• a fixed base;
• a movable base that is moveable in a linear direction with respect to the fixed base;
• a processing base that is movable in a linear direction with respect to the movable base, the linear direction being in parallel with the linear moving direction of the movable base;
• and a moving force generating unit that is provided between the processing base and the movable base, and forms a main moving unit in cooperation with the processing base and the movable base,
• the method comprising the steps of:
• generating a moving force to accelerate and decelerate the processing base with respect to the movable base, so that the processing base is moved with respect to the movable base, and, as a result, the processing base is moved with respect to the fixed base;
• moving the movable base on the fixed base in the opposite direction to the moving direction of the processing base by virtue of a reaction force caused by the moving force generated from the moving force generating unit to move the processing base;
• converting the reaction force caused by the movement of the processing base into linear-direction inertial movements of the movable base, so that the processing base and the movable base linearly move with respect to each other;
• controlling the moving velocity of the processing base and the movable base that interactively move on the fixed base in linear directions,
• wherein the linear-direction inertial movements of the movable base caused by the reaction force generated from the movement of the processing base includes accelerating or decelerating movements and a uniform velocity movement.