Back to results
US 7,586,165 B2Granted
Microelectromechanical systems (MEMS) device including a superlattice
AssigneeMears Technologies, Inc.
InventorRichard A. Blanchard
Life of this patent
Estimating the term…
Abstract
A microelectromechanical system (MEMS) device may include a substrate and at least one movable member supported by the substrate. The at least one movable member may include a superlattice including a plurality of stacked groups of layers with each group of layers of the superlattice comprising a plurality of stacked base semiconductor monolayers defining a base semiconductor portion, and at least one non-semiconductor monolayer constrained within a crystal lattice of adjacent base semiconductor portions.
Claims14
A microelectromechanical system (MEMS) device comprising:
- a substrate;
- and
- at least one movable member supported by said substrate and comprising a piezoelectric superlattice including a plurality of stacked groups of layers with each group of layers of said piezoelectric superlattice comprising a plurality of stacked base semiconductor monolayers defining a base semiconductor portion and at least one non-semiconductor monolayer constrained within a crystal lattice of adjacent base semiconductor portions.
Dependencies are inferred from the claim text.