Method for re-registering an object to be aligned by re-capturing images using previously registered conditions and storage medium storing a program for executing the method
AssigneeTokyo Electron Limited
InventorFumito Kagami
Life of this patent
Estimating the term…
Abstract
A method for re-registering at least one set of image information of an object to be aligned to align the object by an imaging unit, the image information including photographing conditions and position data of the object which have been previously registered by capturing an image of the object with the imaging unit. The method includes automatically moving at least one of the object and the imaging unit based on the position data of the image information and re-capture the image of the object with the imaging unit by using the previously registered photographing conditions of the image information and re-registering the image information by using the re-captured image of the object.
Claims5
A method for re-registering at least one set of first and at least one set of second image information of an object to be aligned to thereby align the object by an imaging unit, the first and second image information respectively including photographing conditions and position data of the object which have been previously registered by capturing an image of the object at a low and a high magnification with the imaging unit, the method comprising:
- automatically moving at least one of the object and the imaging unit based on the position data of the first image information and re-capturing the image of the object at the low magnification with the imaging unit by using the previously registered photographing conditions of the first image information;
- re-registering the first image information by using the image of the object re-captured at the low magnification;
- automatically moving at least one of the object and the imaging unit based on the position data of the first image information and re-capturing the image of the object at the high magnification with the imaging unit by using the previously registered photographing conditions of the second image information;
- and
- re-registering the second image information by using the image of the object re-captured at the high magnification.
A storage medium for storing therein a computer-executable program for executing a method for re-registering at least one set of first and at least one set of second image information of an object to be aligned to align the object by an imaging unit, the image information including photographing conditions and position data of the object which have been previously registered by capturing an image of the object at a low and a high magnification with the imaging unit, the method comprising:
- automatically moving at least one of the object and the imaging unit based on the position data of the first image information and re-capture the image of the object at the low magnification with the imaging unit by using the previously registered photographing conditions of the image information;
- re-registering the first image information by using the re-captured image of the object;
- automatically moving at least one of the object and the imaging unit based on the position data of the first image information and re-capture the image of the object at the high magnification with the imaging unit by using the previously registered photographing conditions of the image information;
- and
- re-registering the second image information by using the re-captured image of the object.
Dependencies are inferred from the claim text.