Coating compositions
AssigneesRohm and Haas Electronic Materials LLC, E.I. duPont de Nemours and Company
InventorsPeter Trefonas, III, Sungseo Cho, David L. Goff, J. Ioan Matthews, Hao Yun
Life of this patent
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Abstract
Coating compositions are provided that include a component that is a product of materials comprising an amine and an anhydride and/or an anhydride derivative. Compositions of the invention are particularly useful as an underlying antireflective coating composition (“ARC”) employed with an overcoated photoresist layer in the manufacture of microelectronic wafers and other electronic devices.
Claims26
A coated substrate comprising:
- an antiretlective composition layer comprising a reaction component,
- the reaction component comprising a product of materials that comprise:
- i) one or more of an anhydride or an anhydride derivative;
- and
- ii) one or more compounds that comprise 1) three or more amine groups or 2) one or more heterocyclic moieties;
- and
- a photoresist layer over the antireflective composition layer.
A coated substrate comprising:
- an antireflective composition layer comprising a reaction component that comprises a polymeric salt reaction product of an amine;
- and
- a photoresist layer over the antireflective composition layer.
An antireflective composition layer for use with an overcoated photoresist layer, comprising:
- a reaction component that comprises a reaction product of materials comprising:
- i) one or more of an anhydride or an anhydride derivative;
- and
- ii) one or more reagent compounds that comprise 1) three or more amine groups or 2) one or more heterocyclic moieties.
An antireflective composition layer for use with an overcoated photoresist layer, comprising:
- a reaction component that comprises a polymeric salt reaction product of an amine.
An antireflective composition comprising a reaction component,
- the reaction component comprising a product of materials that comprise:
- i) one or more of a compound chosen from among benzophenone-3,3′,4,4′-tetracarboxylic dianhydride, and 4,4′-oxydiphthallic anhydride;
- ii) one or more mono-anhydride compounds having a molecular weight of about 250 daltons or less;
- and
- iii) one or more compounds chosen from among 3,3′-diamino diphenylsulfone, 4,4′-diamino diphenylsulfone, and 2,4,6-triaminopyrimidine.
Dependencies are inferred from the claim text.