Systems and methods for processing microfeature workpieces
AssigneeMicron Technology, Inc.
InventorTimothy James Kennedy
Life of this patent
Estimating the term…
Abstract
Systems and methods for processing microfeature workpieces are disclosed herein. In one embodiment, the system comprises a processing chamber having a workpiece processing site configured to receive a microfeature workpiece and a main inlet through which a processing fluid can flow into the processing chamber. The system further comprises a plate in the processing chamber between the main inlet and the workpiece processing site. The plate has a first side generally facing the main inlet and a second side opposite the first side. The plate further includes a plurality of passageways extending from the first side of the plate to the second side. The individual passageways include an inlet portion projecting from the first side of the plate by a separation distance.
Claims39
A system for processing microfeature workpieces, comprising:
- a processing chamber having a workpiece processing site configured to receive a microfeature workpiece;
- a main inlet through which a processing fluid can flow into the processing chamber;
- a plate in the processing chamber between the main inlet and the workpiece processing site, the plate having a first side generally facing the main inlet and a second side opposite the first side, wherein the plate is spaced apart from the main inlet;
- and
- a plurality of passageways extending from the first side of the plate to the second side and aligned with at least a portion of the workpiece processing site, the individual passageways including an inlet portion projecting from the first side of the plate to space inlet openings apart from the first side of the plate.
A system for processing microfeature workpieces, comprising:
- a processing chamber including a sidewall and an interior having a processing site for receiving a microfeature workpiece;
- a conduit in the processing chamber, the conduit having a plurality of nozzles arranged to deliver a flow of processing fluid toward the processing site;
- a plate for conditioning the flow of processing fluid, the plate being spaced apart from the conduit and between the conduit and the microfeature workpiece, the plate having a first side with a generally V-shaped cross-sectional profile generally facing the conduit and a second side opposite the first side;
- and
- a plurality of vias extending through the plate from the first side to the second side and aligned with at least a portion of the processing site, the individual vias having an inlet portion projecting from the first side of the plate.
A system for processing microfeature workpieces, comprising:
- a processing chamber having a workpiece processing site configured to receive a microfeature workpiece;
- a main inlet through which a processing fluid can flow into the processing chamber;
- and
- a flow diffuser plate between the main inlet and the workpiece processing site and positioned generally transverse to a processing fluid flow path, wherein the diffuser plate is separated from the main inlet, and wherein the diffuser plate has a first side generally facing the main inlet, a second side opposite the first side, and a plurality of vias extending from the first side to the second side, the individual vias including a raised feature projecting upstream in the flow path relative to the first side of the flow diffuser plate and an inlet orifice at an upstream end of the raised feature.
A flow conditioning member for use in a system for processing microfeature workpieces, the system including a processing chamber having an inner vessel in which a microfeature workpiece can be immersed in a processing fluid, the flow conditioning member comprising:
- a plate having a first side and a second side opposite the first side, wherein the first side of the plate is configured to face toward a main inlet of the processing chamber, and wherein the plate spaced apart from the main inlet, and further wherein the plate is configured to be positioned transverse to a flow of processing fluid within the chamber;
- and
- a plurality of vias extending through the plate from the first side to the second side and aligned with at least a portion of the inner vessel, the individual vias having an inlet portion projecting from the first side of the plate and inlet openings spaced apart from the first side.
A system for processing microfeature workpieces, comprising:
- a processing chamber having a workpiece processing site configured to receive a microfeature workpiece;
- a main inlet for delivering a processing fluid to the processing site;
- and
- flow conditioning means between the main inlet and the workpiece processing site and positioned generally transverse to a processing fluid flow path, wherein the flow conditioning means is separated from the main inlet, and wherein the flow conditioning means has a first side generally facing the main inlet, a second side opposite the first side, and a plurality of passageways extending from the first side to the second side and aligned with at least a portion of the workpiece processing site, the individual passageways including bubble dispersion means projecting from the first side of the flow conditioning means.
A system for processing workpieces, comprising:
- a processing chamber having a workpiece processing site configured to receive a workpiece;
- a main inlet through which a processing fluid can flow into the processing chamber;
- a plate in the processing chamber between the main inlet and the workpiece processing site, the plate having a first side generally facing the main inlet and a second side opposite the first side, wherein the plate is separated from the main inlet;
- and
- a plurality of passageways extending from the first side of the plate to the second side and aligned with at least a portion of the workpiece processing site, the individual passageways including an inlet portion projecting from the first side of the plate to space inlet openings apart from the first side of the plate.
Dependencies are inferred from the claim text.