Method for producing a single crystal
AssigneeShin-Etsu Handotai Co., Ltd.
InventorMakoto Iida
Life of this patent
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Abstract
A method for producing a single crystal by Czochralski method with pulling a seed crystal from a raw material melt, wherein in which a range of a pulling rate of pulling a single crystal, a temperature gradient at a solid-liquid interface and a highest temperature at an interface between a crucible and a raw material melt are defined. The single crystal is pulled with controlling the pulling rate and/or the temperature gradient at a solid-liquid interface within the determined range. The method produces a single crystal in which a desired defect region and/or a desired defect-free region can be determined more precisely and a single crystal with desired quality can be more surely pulled.
Claims6
A method for producing a single crystal by Czochralski method by pulling a seed crystal from a raw material melt, comprising:
- immersing the seed crystal into the raw material melt;
- and
- growing the single crystal by rotating and pulling the seed crystal, wherein:
- the single crystal is pulled while controlling a value of V/G (mm2/K·min) within a range of values of V/G (mm2/K·min);
- and
- the range of values of V/G (mm2/K·min), including a defect region and/or a defect-free region, is controlled according to Tmax(° C.);
- wherein:
- V (mm/min) is a single crystal pulling rate of pulling the single crystal;
- G (K/mm) is a temperature gradient at a solid-liquid interface, in a range of a melting point of the raw material and 1400° C.;
- Tmax(° C.) is a highest temperature of the raw material melt at an interface between a quartz crucible inner wall and the raw material melt;
- and
- the range of values of V/G (mm2/K·min) is:
- (A) from −0.000724 [mm2/(° C.·K·min)]×Tmax(° C.)+1.31 (mm2/K·min) to less than −0.000724 [mm2/(° C.·K·min)]×Tmax(° C.)+1.38 (mm2/K·min);
- or
- (B) −0.000724 [mm2/(° C.·K·min)]×Tmax(° C.)+1.38 (mm2/K·min) or more;
- or
- (C) from −0.000724 [mm2/(° C.·K·min)]×Tmax(° C.)+1.31 (mm2/K·min) to −0.000724 [mm2/(° C.·K·min)]×Tmax(° C.)+1.35 (mm2/K·min).
Dependencies are inferred from the claim text.