Bipolar electrostatic chuck
AssigneeCreative Technology Ltd
InventorKinya Miyashita
Life of this patent
Estimating the term…
Abstract
A bipolar electrostatic including a chuck main body having a mounting surface; an annular electrode member formed in an annular configuration wit a center opening and fixed onto the mounting surface of the chuck main body though an adhesive layer; an inner electrode member disposed at a given clearance from the annular electrode member within the center opening of the annular electrode member and fixed onto the mounting surface through the adhesive layer; and an outer electrode member disposed at a given clearance from the annular electrode member outside of the annular electrode member and fixed onto the mounting surface through the adhesive layer.
Claims9
A bipolar electrostatic chuck, comprising:
- a chuck main body having a mounting surface;
- an annular electrode member which is formed in an annular configuration with a center opening and is fixed onto the mounting surface;
- an inner electrode member which is disposed at a given clearance from the annular electrode member within the center opening of the annular electrode member and is fixed onto the mounting surface;
- and
- an outer electrode member which is disposed at a given clearance from the annular electrode member outside of the annular electrode member and is fixed onto the mounting surface
- wherein, at the time of assembling, the annular electrode member, the inner electrode member, and the outer electrode member are fixed onto the mounting surface through an adhesive layer, the inner electrode member and the outer electrode member constitute a first electrode, and the annular electrode member constitutes a second electrode, and after use, the annular electrode member, the inner electrode member, and the outer electrode member can be separated from the mounting surface by removing the adhesive layer, and
- wherein the adhesive layer is made of the silicone-based adhesive agent, and after use, the annular electrode member, the inner electrode member, and the outer electrode member can be separated from the mounting surface by removing the adhesive layer using a release agent.
A bipolar electrostatic chuck, comprising:
- a chuck main body having a mounting surface;
- an annular electrode member which is formed in an annular configuration with a center opening and is fixed onto the mounting surface;
- an inner electrode member which is disposed at a given clearance from the annular electrode member within the center opening of the annular electrode member and is fixed onto the mounting surface;
- and
- an outer electrode member which is disposed at a given clearance from the annular electrode member outside of the annular electrode member and is fixed onto the mounting surface
- wherein, at the time of assembling, the annular electrode member, the inner electrode member, and the outer electrode member are fixed onto the mounting surface through an adhesive layer, the inner electrode member and the outer electrode member constitute a first electrode, and the annular electrode member constitutes a second electrode, and after use, the annular electrode member, the inner electrode member, and the outer electrode member can be separated from the mounting surface by removing the adhesive layer, and
- wherein the adhesive layer is made of the polyvinyl butyral adhesive agent, and after use, the annular electrode member, the inner electrode member, and the outer electrode member can be separated from the mounting surface by removing the adhesive layer heating at a temperature of about 150° C.
Dependencies are inferred from the claim text.