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US 7,553,512 B2Granted
Method for fabricating an inorganic resistor
AssigneeCabot Corporation
InventorsToivo T. Kodas, Mark J. Hampden-Smith, Karel Vanheusden, Hugh Denham, Aaron D. Stump, Allen B. Schult, Paolina Atanassova, Klaus Kunze
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Abstract
Precursor compositions for the fabrication of electronic features such as resistors and capacitors. The precursor compositions are formulated to have a low conversion temperature, such as not greater than about 350° C., thereby enabling the fabrication of such electronic features on a variety of substrates, including organic substrates such as polymer substrates.
Claims20
A method for fabricating an inorganic resistor on an organic substrate, comprising the steps of:
- a) applying a flowable precursor composition to an organic substrate wherein said precursor composition comprises a molecular precursor to a conductive phase and particles of an insulating material;
- b) heating said substrate to a temperature of not greater than about 350° C. to convert said molecular precursor to said conductive phase and form a resistor wherein said resistor has a resistivity of at least about 100 μΩ-cm.
Dependencies are inferred from the claim text.