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US 7,547,979 B2Granted
Semiconductor device and method of locating a predetermined point on the semiconductor device
AssigneeSamsung Electronics Co., Ltd.
InventorsJin Kook Jung, Hark-Moo Kim
Life of this patent
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Abstract
Marking lines or patterns are formed among dummy patterns or on a reference plain of a semiconductor device requiring analysis to enable easy location of a point on the semiconductor device.
Claims5
A semiconductor device comprising:
- a semiconductor substrate;
- dummy patterns for a chemical mechanical polishing (CMP) method formed in a uniform pattern over the semiconductor substrate;
- and
- marking patterns that are formed over the semiconductor substrate to correspond to predetermined groups of the dummy patterns,
- wherein at least one dummy pattern is formed between two marking patterns,
- wherein a number of the dummy patterns is substantially greater than a number of the marking patterns, wherein the marking patterns are smaller than the dummy patterns.
3 more elements
A semiconductor device comprising:
- a semiconductor substrate;
- dummy patterns for a chemical mechanical polishing (CMP) method formed in a uniform pattern over the semiconductor substrate;
- and
- marking patterns that are formed over the semiconductor substrate to correspond to predetermined groups of the dummy patterns,
- wherein the marking patterns surround at least a group of dummy patterns, wherein a size of the marking patterns is smaller than a size of the dummy patterns.
2 more elements
A semiconductor device comprising:
- a semiconductor substrate;
- dummy patterns for a chemical mechanical polishing (CMP) method formed in a uniform pattern over the semiconductor substrate;
- and
- marking patterns that group predetermined plural numbers of the dummy patterns and are formed over the semiconductor substrate;
- wherein the marking patterns and the predetermined plural numbers of the dummy patterns grouped by the marking patterns form a unit, which is repeated.
2 more elements
Dependencies are inferred from the claim text.