Microimprint/nanoimprint uniform pressing apparatus
AssigneeIndustrial Technology Research Institute
InventorsShou-Ren Chen, Chuan-Feng Chen, Yu-Lun Ho, Jen-Hua Wu, Wei-Han Wang, Lai-Sheng Chen
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Abstract
A microimprint/nanoimprint uniform pressing apparatus is used to provide uniform imprinting pressure to a molding material layer between a substrate and a mold. The uniform pressing apparatus includes a uniform pressing unit for being directly in contact with the mold or the substrate, so as to allow each point to have equal pressure during imprinting and utilize a simple structure to transmit uniform imprinting pressure.
Claims14
A microimprint/nanoimpnnt uniform pressing apparatus for providing uniform imprinting pressure to a molding material layer formed between a substrate and a mold, the microimprint/nanoimprint uniform pressing apparatus comprising:
- a holding unit formed with an opening at one end thereof and an accommodating space therein;
- a driving unit connected to the holding unit;
- a uniform pressing unit being directly in contact with the substrate or the mold and comprising a fluid and a bag-shaped flexible membrane;
- a carrier unit for providing support for performing imprint molding;
- and
- two transmission units provided at two sides of the carrier unit respectively, for transmitting the substrate in the form of a continuous strip,
- wherein the fluid fills in the accommodating space and the opening is sealed by the flexible membrane such that the fluid is enclosed by the holding unit and the flexible membrane.
A microimprint/nanoimprint uniform pressing apparatus mounted to a holding unit connected to a driving unit, so as to provide uniform imprinting pressure to a molding material layer between a substrate and a mold, the microimprint/nanoimprint uniform pressing apparatus comprising:
- a bag-shaped flexible membrane connected to the holding unit, for being directly in contact with the mold or the substrate;
- a fluid enclosed by the holding unit and the flexible membrane;
- a carrier unit for providing support for performing imprint molding;
- and
- two transmission units provided at two sides of the carrier unit respectively, for transmitting the substrate in the form of a continuous strip.
Dependencies are inferred from the claim text.