Transfer device for substrate and storing device and hand therein, and substrate handled by the device
AssigneesHitachi Plant Technologies, Ltd., Sharp Kabushiki Kaisha
InventorsHiroshi Chinbe, Yoshiya Endo, Naoki Shimakawa, Ichiro Fukuwatari, Yoshiaki Hayashida, Yoshio Takakura, Akio Matsuyama, Hideto Kohketsu
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