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US 7,479,689 B2Granted
Electronically programmable fuse having anode and link surrounded by low dielectric constant material
AssigneeInternational Business Machines Corporation
InventorsDeok-Kee Kim, Xiangdong Chen, Haining Yang
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Abstract
An electronically programmable fuse (e-fuse) is disclosed. In one embodiment, the e-fuse includes a cathode surrounded only by silicon dioxide; an anode; and a polysilicon-silicide programmable link coupling the anode and the cathode, wherein the anode and the polysilicon-silicide programmable link are surrounded by a low dielectric constant (low-k) material on a top and a side thereof.
Claims9
An electronically programmable fuse (e-fuse) comprising:
- a cathode surrounded only by silicon dioxide;
- an anode;
- a polysilicon-silicide programmable link coupling the anode and the cathode, wherein the anode and the polysilicon-silicide programmable link are surrounded by a low dielectric constant (low-k) material on a top, a bottom and a side thereof;
- and
- a silicon nitride barrier layer between the anode and the polysilicon-silicide programmable link and the low-k material.
2 more elements
An electronically programmable fuse (e-fuse) comprising:
- a cathode surrounded only by silicon dioxide;
- an anode;
- a polysilicon-silicide programmable link coupling the anode and the cathode, wherein the anode and the polysilicon-silicide programmable link are surrounded by hydrogenated silicon oxycarbide (SiCOH) on a top, a bottom and a side thereof;
- and
- a silicon nitride barrier layer between the anode and the polysilicon-silicide programmable link and the SiCOH.
2 more elements
Dependencies are inferred from the claim text.