Thermal processing unit

A thermal processing method of an object to be processed using a thermal processing unit, the thermal processing unit including:

• a heating-furnace body whose upper end has an opening,
• a furnace-body lid provided at the opening of the heating-furnace body,
• a first heating unit provided on an inside wall of the heating-furnace body,
• a reaction container consisting of a single tube contained in the heating-furnace body,
• a gas-discharging-pipe connecting portion formed at an upper portion of the reaction container and penetrating the furnace-body lid, and
• a first temperature controlling unit provided around the gas-discharging-pipe connecting portion,
• wherein
• the gas-discharging-pipe connecting portion has a cervical portion whose diameter gradually reduces from a diameter at an upper portion of the reaction container,
• a second heating unit is provided in a vicinity of the cervical portion of the gas-discharging-pipe connecting portion,
• the gas-discharging-pipe connecting portion is bent at an angle of about 90 degrees,
• a gas-discharging pipe for discharging atmosphere in the reaction container is connected to the gas-discharging-pipe connecting portion,
• a second temperature controlling unit is provided around the gas-discharging pipe,
• a third heating unit is provided in a vicinity of the upper portion of the reaction container, and
• a fourth heating unit is provided in a vicinity of a lower portion of the reaction container,
• the thermal processing method comprising:
• a step of conducting a thermal process of the object to be processed by means of the first heating unit, the second heating unit, the third heating unit and the fourth heating unit, and
• a step of controlling a temperature of the gas-discharging-pipe connecting portion to a temperature substantially equal to a thermal processing temperature of the object to be processed, by means of the first temperature controlling unit.

A thermal processing method of an object to be processed using a thermal processing unit, the thermal processing unit including:

• a heating-furnace body whose upper end has an opening,
• a furnace-body lid provided at the opening of the heating-furnace body,
• a first heating unit provided on an inside wall of the heating-furnace body,
• a reaction container consisting of a single tube contained in the heating-furnace body,
• a gas-discharging-pipe connecting portion formed at an upper portion of the reaction container and penetrating the furnace-body lid, and
• a first temperature controlling unit provided around the gas-discharging-pipe connecting portion,
• wherein
• the gas-discharging-pipe connecting portion has a cervical portion whose diameter gradually reduces from a diameter at an upper portion of the reaction container,
• a second heating unit is provided in a vicinity of the cervical portion of the gas-discharging-pipe connecting portion,
• the gas-discharging-pipe connecting portion is bent at an angle of about 90 degrees,
• a gas-discharging pipe for discharging atmosphere in the reaction container is connected to the gas-discharging-pipe connecting portion,
• a second temperature controlling unit is provided around the gas-discharging pipe,
• a third heating unit is provided in a vicinity of the upper portion of the reaction container, and
• a fourth heating unit is provided in a vicinity of a lower portion of the reaction container,
• the thermal processing method comprising:
• a step of conducting a thermal process of the object to be processed by means of the first heating unit, the second heating unit, the third heating unit and the fourth heating unit, and
• a step of controlling a temperature of the gas-discharging pipe to a temperature of 150 to 300° C., by means of the second temperature controlling unit.