Time resolved non-invasive diagnostics system

An integrated system for testing an integrated circuit chip, comprising:

• a test bench for placing the chip thereupon;
• an illumination source for illuminating the chip;
• a collection system for collecting illumination reflected from said chip, said collection system comprising:
• an objective lens;
• a solid immersion lens (SIL);
• an objective housing having the objective lens mounted therein;
• a SIL holder being movable with respect to said objective housing so as to adjust the distance between the SIL and the objective lens;
• the system further comprising:
• an optical imaging system;
• and,
• a navigation system for orienting said collection system with respect to said chip.

A method for testing a chip while simulating normal operating conditions of said chip, comprising:

• coupling said chip to an Automated Testing Equipment (ATE);
• providing an illumination beam and scanning the illumination beam over the chip using a laser scanning microscope (LSM), so as to image selected areas of said chip through collection optics to identify an area of interest;
• ceasing scanning of the LSM;
• providing said chip with test signals from said ATE;
• collecting photons emitted from said chip while it reacts to said test signals;
• cooling the temperature of said chip at least while collecting said photons.

An optical system for testing an integrated circuit chip, comprising:

• a test bench for placing the chip thereupon;
• collection optics comprising an objective lens housed in an objective lens housing;
• a laser providing a laser beam for illuminating said chip through said collection optics;
• a cooling housing provided about the objective lens housing and having at least one coolant fluid outlet;
• fluid piping coupled to the cooling housing;
• and,
• a coolant pump coupled to the fluid piping and delivering cooling fluid to be delivered onto the chip from the coolant fluid outlet.